Microstructure materials are currently used in different fields. One of these areas is sensor devices such as microfluidic devices. The devices are made from transparent materials such as glass and PDMS (Polydimethylsiloxane). There are several techniques that are currently used to remove substance and create microchannels on material surface, laser ablation is one of the important methods that can be used in microfabrication. This importance results from the development of laser. In the past, laser with long pulse duration (>picosecond) had been used to fabricate microstructure materials, but because pulse duration of laser was longer than thermal relaxation time of ablated material, the thermal effect was present and caused micro crackers into materials. However, after ultrafast pulse laser (pulse duration <picosecond) is generated, the micro processing of materials using this laser allows for the possibility of material removal on order of micro scale with low thermal damage. In fact, manufacture of microstructure materials using ultrafast pulse laser is still under study.
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